| ALL GROUPSBACK TO LAMINATING - LAMINATION DIVISION | ||
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| Make/Type: | WaferBasedSolutions / Lucide Spray Station | |
| Group-Subgroup: | 8 Laminating - Lamination Division | |
| Reference: | S-LTD-320 | |
| Condition: | 05 USED As seen and approved | |
| Price: | 6500 € | |
| Info: | Spacering Tool
Palas RBG 1000 unit Spacering module To create a good functioning cell the two plates need to be exactly spaced apart. To achieve this, one of the plates is covered with small balls, called spacers. These spacer balls consist of small polymer balls that all have the same diameter (at least with very tight tolerances). Spacers are applied in the spacering module. Before spacers can be applied the plate need to be rubbed. To move the plate from the rubbing module to the spacering module, the plate can float on compressed air and is guided by bands that can be operated by wheels outside the cabin. The plate should be placed in the center of the tool. In the spacering module, the spacers are dispensed on the plate by blowing a mix of nitrogen and spacers on the plate by a moving tube. To create this mix the spacering module has a spacer source on the back of the tool, the PALAS RBG 1000. For a complete understanding of the working of the spacer source please check the PALAS manual and chapter 0. The exhaust is connected to a special conducting tube which itself is connected to the revolving spacer tube in the center. The collisions of the spacers to the conducting walls charges the spacers and prevents spacers from clogging together. When the spacers leave the tube the spacers spread out and land on the surface of the plate and everywhere else in the cabin. To cover the whole plate, the tube can revolve in a pattern and adjust its speed. To move the tube, two stepper motors are present, and their combined movement determines the position and speed of the tube. To keep the spacer particles from entering other modules and for human safety, an exhaust with filter is placed below the cabinet. For process, cost and efficiency, the spacer concentration should be homogeneous and between 150 and 200 spacers/cm2. To achieve this, a number of process parameters are available, see details in chapter 8.3.1. |
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